Photonic crystal pressure sensor

09.22.21 | Patents | 0 comments

Abstract

The present invention provides a microscale pressure sensor that exhibits high sensitivity in a small form factor. The sensor is a bridged device in which a photonic crystal waveguide, surrounded by a photonic crystal slab, is suspended over a dielectric substrate. Under applied pressure, the photonic crystal waveguide is deflected toward the substrate, causing a decrease in optical transmission across the waveguide due to the coupling of the evanescent field of the guided mode to the dielectric substrate. In a preferred embodiment, the waveguide is coupled to a photonic crystal microcavity, which increases evanescent coupling.

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